To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...

What is Atomic Layer Etching? Atomic layer etching (ALE) is a highly controlled and selective etching technique that removes material layer by layer at the atomic scale. It is a cyclic process that ...

Sounds like a win all around. But Twitter wouldn’t stand for this chemical heresy, with comments suggesting that the etching process would release chlorine gas, or that ferric chloride is far ...

Plasma-based atomic layer etching is a cyclical etching process of gas dosing and ion bombardment that eliminates material layer by layer and has the potential to eliminate single atomic layers with ...