and then be transported in the vapor phase by an inert carrier gas such as nitrogen. This allows for positioning of evaporation sources outside of the reactor tube spatially separating the functions ...

“To date, sequential vapor-phase processes may offer the highest, however, there are still too slow dynamic deposition rates,” Ulrich W. Paetzold, co-corresponding author and leader of the ...

PVD: Involves the physical transition of a material from a condensed phase to a vapor phase by sputtering or evaporation in a vacuum environment, followed by deposition on the substrate. The process ...