The team developed an automated wafer transfer system enclosed in a test bench and a measurement system to determine surface profiles while the wafer is moving. This measurement must be taken in ...

Additionally, the SB6e and SB8e chamber, tooling, and fixtures are used in SUSS' ABC200 and CBC200 production cluster tools which allows easy technology process transfer from low volume production to ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The EVG101 resist processing system from ...