Goertek Optics Technology Co. ('Goeroptics'), a subsidiary of Goertek, has unveiled its latest full-color augmented reality (AR) etching waveguide module, Star G-E1, and its proprietary DLP (Digital ...
This groundbreaking technique, also referred to as MacEtch or MACE, provides ultra-high anisotropy etching that’s free from damage. It is an innovative approach that effectively addresses the ...
Abstract: In this review article, various aspects of plasma etching for very large scale integrated (VLSI) circuit technology are presented. The motivation for using plasma etching and the advantages ...
However, the process, known as reactive ion etching, isn't fully understood and could be improved. One recent development involves keeping the wafer––the sheet of semiconductor material to be ...