Similarly to the historical development of those materials, understanding and control of the defect structure in oxides is of paramount importance. In the midst of much discussion for eliminating ...

During the manufacture of a metal-oxide semiconductor (MOS) capacitor ... Cleaning Corrosion 2 Before Cleaning Doping 1 Before Cleaning Metallization 2 Before Cleaning Miscellaneous 3 Before Cleaning ...

"In this class of materials, comprising many transition metal oxides, a small change of the ... these transitions are not random but depend on defects in the structure's topology.