Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China Center of Materials Science and Optoelectronics Engineering, and ...
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In this work, a fabrication process of thin-film encapsulation (TFE) with aluminum nitride (AlN)/molybdenum (Mo) cap is proposed for the packaging of film bulk acoustic wave resonators and filters.
The Fabricator is North America's leading magazine for the metal forming and fabricating industry. The magazine delivers the news, technical articles, and case histories that enable fabricators to do ...