Electron cyclotron resonance (ECR) is a phenomenon observed in plasma physics, condensed matter physics, and accelerator physics. It happens when the frequency of incident radiation coincides with the natural frequency of rotation of electrons in magnetic fields.

关于反应离子刻蚀RIE（reactive ion etching）的工作原理，在这里就不展开讲，本文章主要介绍ECR（electron cyclotron resonance）产生等离子体的工作原理。 状态1：电子在均匀磁场中的运动关系（ 洛伦兹力）如图…

Electron cyclotron resonance (ECR) plasma sources are used for a variety of materials processing applications such as semiconductor etching and deposition. Their use in research became widespread in the late 1980's and ECR-based tools have now entered production.

2024年4月19日 · In this paper, we provide a comprehensive and systematic overview of some selected well-known fundamental analytical relations of gyrotron theory, which are usually treated separately and without sufficient details in otherwise excellent monographs on gyrotron physics (see, e.g., [15, 16, 17, 18, 19, 20, 21, 22]).

在离子源腔体内，轴向磁场由永磁铁与三个辅助线包产生，当馈入微波频率与电子在磁场中的拉摩回旋频率相等时会产生共振，电子获得能量，从而使腔体内的工作气体电离形成 等离子体。 共振应满足： ——静磁场磁感应强度（T）。 [2] 当 为2.45GHz时，按上式， 应为8.75X10 -2 T。 实际在等离子体腔内，由于受到等离子体密度和回旋电子的去磁作用等因素的影响，电子会在为8.75X10-2T附近形成共振并吸热。 这是经典加热理论得出的结果，但对于 低温等离子体 的加 …

回旋共振（cyclotron resonance），或回旋谐振，描述的是外力与磁场中带电粒子的相互作用所产生的共振的现象。 其得名于 回旋加速器 ，而回旋加速器的原理正是将一个交变电场的频率调谐至其回旋共振频率，在每个周期给予粒子一定的动能，如此可以将粒子加速 ...

Miniature electron cyclotron resonance (ECR) ion sources are widely used in compact ion implanters, miniature neutron tubes, and miniature ion thrusters. To understand the mechanism of miniature ECR ion source, a miniature deuterium ion source developed by Peking University is taken as the research object.

An electron cyclotron resonance (ECR) plasma is used to deposit C:H films from methane and erode the deposited films with hydrogen or oxygen plasmas. The chamber is pumped to a base pressure in the 10–4 Pa range by a combination of a turbomolecular and a rotary pump. The gas flow is measured by flow controllers and ranges from 15 sccm to 20 sccm.

Diagram of a cyclotron orbit of a particle with speed v, which is the classical trajectory of a charged particle (here positive charge) under a uniform magnetic field B.. Cyclotron resonance describes the interaction of external forces with charged particles experiencing a magnetic field, thus moving on a circular path.It is named after the cyclotron, a cyclic particle accelerator that ...

2023年2月5日 · 电子回旋共振（ECR-Electron Cyclotron Resonance）离子源属于无阴极放电离子源，能够产生更大 流强和更高电荷态的离子束，可在较大范围气压下长期稳定工作、重复性能好、引出束的能散和发射度低、离子种类广.